Princeton University – Andlinger Center Plasma-Therm Apex SLR Installation

The Andlinger Center for Energy and the Environment at Princeton University is a multi-disciplinary research and education center. The project included the demolition and relocation of existing plasma etching equipment to accommodate the installation of two new Plasma-Therm tools, the procurement and installation of abatement systems to support these new tools, corrective work associated with the abatement tools, and strategies, procurement and installation of new abatement tools for future purchases and associated infrastructure.

Princeton required utility modifications for the relocation and modification of existing process equipment and the installation of new equipment, including multiple process exhaust abatement systems within the cleanroom. Precis modified the existing exhaust systems, designed new process exhaust between the process equipment and abatement equipment, and revised the hazardous gas monitoring and building automation systems (BAS) for equipment integration. Coordination and staging of demolition and new work was required to minimize shutdowns of existing utilities, maintain existing operations of the cleanroom lab space for other users, and maintain dimensional requirements for egress, removal, and installation of new materials and equipment.

Precis designed the project in a 3D Revit model and provided customized piping specifications to accommodate the specialized gasses required for plasma etching as well as the broad scope of material compatibility required for the abatement systems to prevent corrosion.